納米三坐標測量機不確定度分析與精度設計
楊洪濤[1] 費業泰[2] 陳曉懷[1][1]合肥工業大學儀器科學與光電工程學院,安徽合肥230009 [2]安徽理工大學機械工程系,安徽淮南232001摘 要:利用現代精度設計理念設計納米三坐標測量機的結構,選用高精度的零部件進行組裝,解決了傳統阿貝誤差問題,通過研究現代精度保障理論和技術,進行納米級水平的誤差源全面分析,推導各個不確定度分量的計算公式,根據給定的精度指標設計合理的精度,提出所需檢定儀器的具體技術指標,精度設計的結果滿足了納米三坐標測量機的測量精度要求.[著者文摘]
關鍵詞:納米三坐標測量機 阿貝誤差全誤差源分析 不確定度 精度設計
分類號: TG8 TH7[著者標引]文獻標識碼:A文章編號:1000-582X(2006)08-0082-05欄目信息:機械·光電工程
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Uncertainty Analysis and Accuracy Design of Nano-CMMYANG Hong-tao , FEI Ye-tai , CHEN Xiao-huai 1. School of Instrument Science and Opto-electronic Engineering Hefei University of Technology, Hefei 230007, China; 2. Department of Mechanical Enginneering of Anhui University of Science & Technology, Huainan 232001, ChinaAbstract:By using advanced accuracy design concept, Nano-CMM's structure is designed, which is set-up by choosing high degree of accuracy components. The traditional Abbe error is solved due to the design of the structure of the Nano- CMM. By studying the modem accuracy ensuring theory and technique, the nanometer level's analysis of total error source of the Nano-CMM is processed. The uncertainty calculating formula is deduced. The reasonable error distributing and design are clone according to the given accuracy target. The needed nanometer level calibrating instruments'technic index are put forward. The result of accuracy design meets the measuring accuracy demand of Nano-CMM is made.[著者文摘]
Key words:Nano-CMM ; Abbe error; analysis of total error source ; uncertainty accuracy design |
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