雙縱模雙頻激光干涉儀的非線性對(duì)測(cè)量精度的影響

楊春生[1,2] 張濤[1] 成俊康[1] 劉國(guó)棟[1][1]四川大學(xué)制造科學(xué)與工程學(xué)院,成都610065 [2]中國(guó)測(cè)試技術(shù)研究院,成都610021摘　要:對(duì)具有特殊后續(xù)電信號(hào)處理系統(tǒng)的雙縱模雙頻激光干涉儀的非線性誤差進(jìn)行了研究。根據(jù)理論分析推導(dǎo)出了存在非線性時(shí)輸出信號(hào)的表達(dá)式，并據(jù)此給出了非線性誤差的表現(xiàn)形式是使混頻輸出信號(hào)產(chǎn)生漂移起伏，主要影響因素是偏振分光鏡分光偏振度及光路調(diào)整理想程度。根據(jù)分光偏振度可計(jì)算信號(hào)最大漂移幅度及其帶來(lái)的測(cè)量誤差，計(jì)算出的漂移幅度值與實(shí)際觀測(cè)值相近，該值可作為判斷光路調(diào)整精度的一個(gè)標(biāo)準(zhǔn)，也是確定后續(xù)信號(hào)處理環(huán)節(jié)（細(xì)分辨向計(jì)數(shù)）中最大細(xì)分?jǐn)?shù)的依據(jù)。[著者文摘]

Influence of nonlinearity on measuring precision of dual-frequency laser interferometer with two longitudinal modesYang Chun-sheng, Zhang Tao, Cheng Jun-kang, Liu Guo-dong 1. School of Manufacturing Science and Engineering, Sichuan University, Chengdu 610065, China; 2. National Institute of Measurement and Testing Technology, Chengdu 610021, ChinaAbstract:The nonlinearity error of the dual-frequency laser interferometer with two longitudinal modes and special subsequent electrical signal processing system was studied. The expressions for the output signal pair were desired based on the theoretical analysis when the nonlinearity exised. From the above it was given that the nonlinearity makes the frequency-mixing output signals shift and undulate, and its main factors are the perfection degree of the optical system adjustment and the polarization splitting degree of the polanzation beam splitter. The maximum signal shift amplitude was close to that observed on oscillograph and it could be used to estimate the perfection degree of the optical system adjustment and determine the maximum interpolation number in the subsequent signal processing stage.[著者文摘]

Key words:technology of instrument and meter;longitudinal mode; dual-frequency laser interferometer; nonlinearity; shift; polarization splitting degree