宮美望[1] 劉文君[2]
[1]青島市計量測試所,山東青島266071
[2]青島市水利勘測設計院有限公司,山東青島266023
摘 要:在平面等厚干涉儀上檢定平晶工作面平面度時,需要在被檢區域調整出3到5條干涉條紋,依據測量原理和計算公式求出被檢平晶工作面的平面度。文章重點分析干涉條紋的快速調整方法與標準平晶平面度的正確引用方法。[著者文摘]
Quick-adjusting Method of Interference Fringes and Flatness Calculation of Optical Flat Working SurfaceGONG Mei-wang, LIU Wen-jun 1. Qingdao Institute of Measurement and Testing , Qingdao 266071, China; 2. Qingdao Water Conservancy Survey Design Institute Limited Company, Qingdao 266023, ChinaAbstract:Flatness of optical flat working surface was verified by use of plane equal-thickness interferometer. In verification, 3 to 5 interference fringes must be adjusted in measured area, then flatness of optical flat working surface was calcuylated based on measuring principle and foroula. Quick adjusting method of interference fringes and correct quotation method of standard optical flat flatness are analyzed.[著者文摘]
Key words:equal-thickness interference; interference fringe; adjusting method; flatness; calculation |
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