抗沖擊耐高溫微加速度傳感器設計

徐春曉[1,2] 房立清[1] 周新偉[1]
[1]軍械工程學院火炮工程系,河北石家莊050003 [2]71345部隊,山東淄博255000
摘　要:設計了一種耐高溫（400℃）、抗過載（20000gn）的SOI微加速度傳感器的結構，介紹了傳感器的制作工藝，并應用ANSYS軟件對其進行了仿真，討論了傳感器的量程、抗沖擊能力、靈敏度、橫向靈敏度、線性度等各項指標，證明該微傳感器滿足了設計時所提出的要求。[著者文摘]

Design of micro-acceleration sensor with impact resistance and high-temperature resistanceXU Chun-xiao, FANG Li-qing, ZHOU Xin-wei1. Department of Gun Engineering, Ordnance Engineering College, Shijiazhuang 050003, China;2. 71345 Unit of PLA, Zibo 255000, ChinaAbstract:A sort of SOI micro-acceleration sensor which can endure high temperature （400℃） and overload （20000 gn）are designed, the manufacture and technique of its are introduced, emulation is carried on applying ANSYS. The range, ability to endure impact, sensitivity, sensitivity of landscape orientation, linearity of the sensor are discussed, the results prove the sensor can satisfy the request which is put forward when being designed.[著者文摘]

Key words:high temperature; overload resisitance ; impact resistance; micro-acceleration sensor