高阻計/靜電計檢定裝置的建立及不確定度評定

王曉敏
中國工程物理研究院計量測試中心,四川綿陽621900
摘　要:為了實現對高阻計靜電計準確、可靠的校準／檢定，特建立高阻計，靜電計檢定裝置。該檢定裝置由KEITHLEY 263校準儀，源組成，采用直接測量法進行校準，檢定工作。通過對其測量不確定度進行詳細評定，證明高阻計，靜電計檢定裝置可圓滿地實現對KEITHLEY 6517A等高精密靜電計，高阻計的校準／檢定，從而大大增強了電磁學計量領域高值電阻和微電流等參數的測試能力。[著者文摘]


Establishment and uncertainty evaluation of high resistance meter/electrometer verification equipmentWANG Xiao-min Metrology and Testing Center,China Academy of Engineering Physics,Mianyang 621900,ChinaAbstract:The high resistance meter ＆ electrometer verification equipment was set up in order to achieve accurate and reliable calibration and verification of high resistance meter ＆ electrometer. The high resistance meter ＆ electrometer verification equipment was formed by the KEITHLEY 263 Calibrator ＆ Source. The calibration ＆ verification work used the method of direct measurement. The accurate evaluation of uncertainty indicated that the high resistance meter ＆ electrometer verification equipment could achieve accurate calibration ＆ verification for KEITHLEY6517A, etc. This greatly increased the test ability of high-value resistors and micro-current in the electromagnetic measurement fields.[著者文摘]

Key words:High resistance meter ＆ electrometer verification equipment; Calibration ＆ verification; Direct measurement; Uncertainty ; Evaluation