Methods for quantitative measurement of drift in scanning probe microscopyCHEN Yu-hang, HUANG Wen-hao Department of Precision Machinery and I , University of Science and Technology of China ,Hefei 230026,ChinaAbstract:Several quantitative drift measurement techniques for scanning probe microscopy （SPM） were introduced. A new method using two-dimensional zero-reference masks was proposed to measure the SPM drift. Four techniques used in drift measurement were compared. They were based on imaging normal sample, periodical regular pattern, zero-reference mask and atomic grating respectively. Results showe that when using zero-reference grating it is not sensitive to tip-induced artifacts in images and the measuring range is not affected by the width of grating element. Thus, this method is superior to the one based on imaging normal samples or regular patterns, while using atomic grating could be expected to obtain sub-atomic resolution for drift measurement.[著者文摘]