Uncertainty Analysis and Accuracy Design of Nano-CMMYANG Hong-tao , FEI Ye-tai , CHEN Xiao-huai 1. School of Instrument Science and Opto-electronic Engineering Hefei University of Technology, Hefei 230007, China; 2. Department of Mechanical Enginneering of Anhui University of Science ＆ Technology, Huainan 232001, ChinaAbstract:By using advanced accuracy design concept, Nano-CMM＇s structure is designed, which is set-up by choosing high degree of accuracy components. The traditional Abbe error is solved due to the design of the structure of the Nano- CMM. By studying the modem accuracy ensuring theory and technique, the nanometer level＇s analysis of total error source of the Nano-CMM is processed. The uncertainty calculating formula is deduced. The reasonable error distributing and design are clone according to the given accuracy target. The needed nanometer level calibrating instruments＇technic index are put forward. The result of accuracy design meets the measuring accuracy demand of Nano-CMM is made.[著者文摘]